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Absolute Cross Sections for the Electron‐Impact Dissociation of CF 4 and CHF 3 into the CF x (x = 1−3) Neutral Radicals
Author(s) -
Sugai H.,
Toyoda H.,
Nakano T.,
Goto M.
Publication year - 1995
Publication title -
contributions to plasma physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.531
H-Index - 47
eISSN - 1521-3986
pISSN - 0863-1042
DOI - 10.1002/ctpp.2150350409
Subject(s) - radical , dissociation (chemistry) , atomic physics , electron ionization , ionization , electron , physics , materials science , chemistry , ion , nuclear physics , organic chemistry , quantum mechanics
The electron‐impact energy dependence of the dissociation cross sections of CF 4 and CHF 3 into the CF x (x = 1 − 3) free radicals was previously reported, in which the absolute values of the cross sections were tentatively estimated based on certain assumptions for the unknown ionization cross sections of the CF 2 and CF radicals. These assumptions are no longer needed, since a complete set of absolute parent and dissociative ionization cross sections of CF x radicals has been reported recently by Becker and co‐workers. Based on these data, the absolute cross sections for the electron‐impact neutral dissociation of CF 4 and CHF 3 into CF 3 , CF 2 and CF from the threshold up to 200–300 eV have now been accurately calibrated. Adjustments to the previously reported absolute cross sections of up to a factor of 16 were necessary.