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D. Herrmann, Schichtendickenmessung; R. Oldenbourg Verlag München, Wien 1993. IX, 354 pp., 176 figs., 43 tabs.; Hardcover, DM 78,‐, ISBN 3‐486‐22203‐1 With a contribution by W. Fukarek (Ellipsometric determination of film thickness)
Author(s) -
Schmidt M.
Publication year - 1993
Publication title -
contributions to plasma physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.531
H-Index - 47
eISSN - 1521-3986
pISSN - 0863-1042
DOI - 10.1002/ctpp.2150330408
Subject(s) - citation , physics , humanities , philosophy , library science , computer science