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An Experimental and Theoretical Study of the Creation Plasma Process in dc Pulsed Discharges
Author(s) -
Ballesteros J.,
Hernández M. A.,
Dengra A.,
Colomer V.
Publication year - 1991
Publication title -
contributions to plasma physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.531
H-Index - 47
eISSN - 1521-3986
pISSN - 0863-1042
DOI - 10.1002/ctpp.2150310604
Subject(s) - plasma , argon , materials science , process (computing) , pulsed dc , atomic physics , physics , nanotechnology , computer science , nuclear physics , thin film , sputter deposition , sputtering , operating system
An experimental study of the evolution along the creation process of the plasma parameters characterizing a dc pulsed Argon discharge has been developed. The diagnostic of these parameters is based on the I — V probe characteristic technique. The electron density evolution values so measured are in a good agreement with those obtained from a theoretical model of this process, so the validity of the assumptions involving the model are confirmed.