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Energetic Characteristics of Oxygen Plasma
Author(s) -
Arutunyan G. G.,
Babalyants L. P.
Publication year - 1990
Publication title -
contributions to plasma physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.531
H-Index - 47
eISSN - 1521-3986
pISSN - 0863-1042
DOI - 10.1002/ctpp.2150300605
Subject(s) - atomic physics , plasma , electron temperature , ionization , electric field , materials science , oxygen , electron , torr , excitation , atmospheric temperature range , range (aeronautics) , analytical chemistry (journal) , ion , physics , chemistry , thermodynamics , chromatography , quantum mechanics , composite material
A low‐temperature oxygen plasma is studied using the thermocouple, probe and spectral method in the range of 2–8 Torr pressure, 30–100 mA discharge currents, 0, 5, 10 m/s pumping velocity. The gas temperature, concentrations of electrons and oxygen atoms in the 3 p 5 P state, and the longitudinal electric field are measured. Radial distributions of gas temperature and electron concentration are obtained. Ranges of pressures and currents are found in which considerable increases in electric field, discharge voltage, temperatures of gas and electrons are observed at pumping switched on. An estimate of the rate constant of the steplike ionization through the O 2 ( a 1 Δ g ) state is given. The concentration of atomic oxygen in the ground state and excitation constant of the triplet O(3 p 5 P ) by electron impact are obtained from the solution of the balance equations and our experimental data.