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The use of Langmuir Probe Methods for Plasma Diagnostic in Middle Pressure Discharges
Author(s) -
David P.,
Sicha M.,
Tichy M.,
Kopiczynski T.,
Zakrzewski Z.
Publication year - 1990
Publication title -
contributions to plasma physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.531
H-Index - 47
eISSN - 1521-3986
pISSN - 0863-1042
DOI - 10.1002/ctpp.2150300202
Subject(s) - langmuir probe , neon , langmuir , plasma diagnostics , plasma , interpretation (philosophy) , atomic physics , electron density , materials science , physics , computational physics , nuclear physics , chemistry , computer science , argon , aqueous solution , programming language
The article attempts to summarize the most important knowledge about the analysis of a Langmuir probe at middle pressures. First it briefly reviews the recent theories which deal with interpretation of Langmuir probe data at such conditions and then it applies the theory to the measurements in a Neon discharge at pressures 1.86 and 2.46 kPa. The charged particle density and the electron temperature obtained from the same probe data using different theories is compared against each other and a satisfactory agreement is obtained. The recommended procedure of probe data interpretation is given at the end of the paper.