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Excitation Temperature Measurement of Ar + N 2 RF Plasma by Spectroscopic Method
Author(s) -
Joshi N. K.,
Thiagarajan T. K.,
Rohatgi V. K.,
Ashtamoorthy T. S.
Publication year - 1989
Publication title -
contributions to plasma physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.531
H-Index - 47
eISSN - 1521-3986
pISSN - 0863-1042
DOI - 10.1002/ctpp.2150290109
Subject(s) - excitation , plasma , materials science , atomic physics , excitation temperature , wavelength , argon , radio frequency , spectral line , boltzmann constant , range (aeronautics) , analytical chemistry (journal) , plasma parameters , emission spectrum , physics , chemistry , optoelectronics , thermodynamics , telecommunications , quantum mechanics , astronomy , chromatography , computer science , composite material
The mixed gas (Ar + N 2 ) plasma has been generated by a 6 KW, 10.3 MHz radio frequency oscillator. The flame got extinguished if N 2 exceeded more than 20% of Ar. The Boltzmann plot using spectral intensities of Ar I and NI lines in the wavelength range 4000–4510 Å have been used to determine the excitation temperature. The results show that excitation equilibrium between two species exist since the temperatures are found to be nearly same for both species.