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The Impact of Different CO Admixtures on the Electron Kinetics in Collision Dominated RF He/CO Bulk Plasmas
Author(s) -
Dilonardo M.,
Capitelli M.,
Gorse C.,
Wilhelm J.,
Winkler R.
Publication year - 1988
Publication title -
contributions to plasma physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.531
H-Index - 47
eISSN - 1521-3986
pISSN - 0863-1042
DOI - 10.1002/ctpp.2150280604
Subject(s) - collision frequency , atomic physics , dissipation , plasma , electron , boltzmann equation , physics , population , materials science , collision , nuclear physics , quantum mechanics , demography , computer security , sociology , computer science
Electron energy distribution functions and mean collision frequencles for the uniform bulk plasma of established rf discharges in He/CO have been obtained by solving the time dependent Boltzmann equation. The results, which are of importance for plasma processing and laser technology, show that already small CO admixtures to He remarkably changes the periodic behaviour of the energy distribution of the electrons by drastical enhancement of the collisional energy dissipation effectiveness in the mixture. These changes can be interpreted on the basis of a lumped energy dissipation frequency in all electron collisions which is determined by the atomic data of the electron collision processes as well as by the admixture fractions and which drastically increases with increasing CO admixture. The degree of modulation of the energy distribution in different parts of the electron energy space and its population on the time average at higher energies are determined by the relation between the rf field frequency and the mentioned lumped energy dissipation frequency.