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A novel antenna for sub‐atmospheric radio‐frequency discharge
Author(s) -
Hu Xinyue,
Chang Lei,
Yuan Xiaogang,
Yang Xin,
Chang Yunju,
Zhang Lupeng,
Zhou Haishan,
Luo Guangnan,
Dai Jia,
Liu Jia,
Hang Guanrong
Publication year - 2020
Publication title -
contributions to plasma physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.531
H-Index - 47
eISSN - 1521-3986
pISSN - 0863-1042
DOI - 10.1002/ctpp.202000003
Subject(s) - plasma , atmospheric pressure , materials science , radio frequency , antenna (radio) , multiphysics , inductive coupling , physics , ionization , radio frequency power transmission , atmospheric pressure plasma , inductively coupled plasma , atomic physics , computational physics , optoelectronics , computer science , telecommunications , ion , amplifier , cmos , quantum mechanics , finite element method , meteorology , thermodynamics
A novel antenna that can generate plasma efficiently for pressure up to thousands of Pascal with 1 kW–13.56 MHz radio‐frequency power supply is reported. It consists of two isolated solenoids so that involves both capacitively coupling and inductively coupling effects, together with magnetic mirror effect which confines the formed plasma axially to a certain extent. Experiments show that the novel discharge has directional preference depending on the applied voltage, a character of dielectric barrier discharge, and can run steadily for tens of hours without severe thermal load. Simulations using COMSOL Multiphysics reveal consistent variations of electron temperature and electron density with base pressure, input power, separation distance of isolated solenoids, and the number of turns of each solenoid. This ionization method is of great interest for plasma processing and propulsion in sub‐atmospheric environment.