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Characteristics of an atmospheric‐pressure radio frequency‐driven Ar/ H 2 plasma discharge with copperwire in tube
Author(s) -
Guo Q.J.,
Ni G.H.,
Li L.,
Lin Q.F.,
Zhao P.,
Meng Y.D.,
Zhao Y.J.,
Sui S.Y.
Publication year - 2018
Publication title -
contributions to plasma physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.531
H-Index - 47
eISSN - 1521-3986
pISSN - 0863-1042
DOI - 10.1002/ctpp.201700015
Subject(s) - plasma , plasma cleaning , atomic physics , argon , materials science , atmospheric pressure , stark effect , atmospheric pressure plasma , jet (fluid) , radio frequency , excitation temperature , plasma parameters , gas filled tube , plasma diagnostics , physics , electric field , chemistry , emission spectrum , mechanics , meteorology , electrical engineering , quantum mechanics , astronomy , spectral line , engineering
This paper investigates a plasma discharge driven by a 13.56 MHz radio frequency ( RF ) power supply at atmospheric pressure, in which a copper wire is inserted in the discharge tube for the deposition of Cu films. The results show that the jet plasma formation originates from the discharge between the copper wire and induction coil because of its electrostatic field. The axial distribution of the plasma parameters in the RF plasma jet, namely the gas temperature, excitation temperature, and electron number density, is determined by diatomic molecule OH fitting, Boltzmann slope, and H β Stark broadening, respectively. The discharge current significantly declines when a small amount of hydrogen is added to the argon as the plasma‐forming gas, and the gas temperature of discharge plasma increases considerably.