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Influence of Plasma‐Neutral Collisions on Probe Measurements in Atmospheric Pressure Plasmas
Author(s) -
Ezumi N.,
Takahashi K.,
Yoshida T.,
Hatada Y.,
Hayashi Y.,
Uchiyama C.,
Iio S.,
Sawada K.,
Ohno N.,
Kiss'ovski Zh.
Publication year - 2014
Publication title -
contributions to plasma physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.531
H-Index - 47
eISSN - 1521-3986
pISSN - 0863-1042
DOI - 10.1002/ctpp.201410074
Subject(s) - plasma , atomic physics , ion , torr , physics , neutral particle , energetic neutral atom , atmospheric pressure , atmospheric pressure plasma , particle (ecology) , electron , drop (telecommunication) , materials science , nuclear physics , thermodynamics , meteorology , telecommunications , oceanography , quantum mechanics , computer science , geology
We report on the influence of plasma‐neutral collisions in the sheath in front of a probe electrode based on the results of particle‐in‐cell simulations. The simulated space potential profiles indicate that the sheath potential drops with increasing neutral gas pressure P n . According to collisionless theory, the apparent electron temperature is three times higher than that corresponding to the collisionless case at P n = 0.1 Torr. To explain the deep negative potential at high P n , the ion reduction factor β for the ion flux is proposed. It is found that β is related to the increased potential drop, however, it is difficult to explain the simulation results quantitatively when only elastic collision between ions and neutral particles are taken into account. (© 2014 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
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