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Effect of Mass and Charge of Ionic Species on Spatio‐Temporal Evolution of Transient Electric Field in CCP Discharges
Author(s) -
Sharma S.,
Mishra S. K.,
Kaw P. K.,
Turner M. M.,
Karkari S. K.
Publication year - 2015
Publication title -
contributions to plasma physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.531
H-Index - 47
eISSN - 1521-3986
pISSN - 0863-1042
DOI - 10.1002/ctpp.201400077
Subject(s) - electric field , ionic bonding , plasma , materials science , transient (computer programming) , excitation , atomic physics , ion , charge (physics) , ionic potential , nonlinear system , physics , molecular physics , chemical physics , quantum mechanics , computer science , operating system
The formation of capacitive sheath and existence of the transition electric field between sheath edge and bulk plasma in RF‐CCP discharge is predicted ( PRL 89, 265006 2002); such structures are sensitive to the plasma composition. On the basis of semi‐infinite particle‐in‐cell (PIC) simulation the effect of charge and mass of ionic species on the spatio‐temporal evolution of the transient electric field and phase mixing phenomena in linear and weakly nonlinear regime has been explored. As an important feature, the simulation results predict that the maximum amplitude of the transient electric field decreases with increasing ionic mass and charge; further the sheath width increases with increasing ionic mass while follow opposite trend with increasing ionic charge. The excitation of wave like structures in the transition region and efficient energy transport to the bulk region of CCP discharges in a nonlinear regime has also been predicted. (© 2015 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)