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The Diagnostics of Dusty Plasma in RF Discharge by Two Different Methods
Author(s) -
Orazbayev S.A.,
Muratov M.M.,
Ramazanov T.S.,
Dosbolayev M.K.,
Silamiya M.,
Jumagulov M. N.,
Boufendi L.
Publication year - 2013
Publication title -
contributions to plasma physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.531
H-Index - 47
eISSN - 1521-3986
pISSN - 0863-1042
DOI - 10.1002/ctpp.201200123
Subject(s) - argon , plasma , dusty plasma , atomic physics , materials science , plasma parameters , hydrogen , methane , plasma diagnostics , physics , chemistry , nuclear physics , organic chemistry , quantum mechanics
This work consists of two parts. First part describes the results of optical spectral diagnostics of dusty plasma of carbonaceous gas mixtures in radio frequency discharge. The change in the emission spectrum of the plasma of mixture of argon and methane with introducing of the dust particles was observed. It was explained by the change in the electron temperature. The same effect was observed in other gases: argon, argon‐hydrogen mixture. The second part is about diagnostics of buffer plasma parameters on the basis of dust structure characteristics obtained in the experiments. The possibility of diagnostics of buffer plasma on the basis of experimental data of microscopic characteristics was shown. (© 2013 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)