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Plasma Chemical Study of a RF Discharge Containing Aluminum Tri‐Isopropoxide Using MIR Absorption Spectroscopy Based on External‐Cavity Quantum Cascade Lasers
Author(s) -
Lopatik D.,
Niemietz S.,
Fröhlich M.,
Röpcke J.,
Kersten H.
Publication year - 2012
Publication title -
contributions to plasma physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.531
H-Index - 47
eISSN - 1521-3986
pISSN - 0863-1042
DOI - 10.1002/ctpp.201200044
Subject(s) - materials science , plasma , absorption spectroscopy , quantum cascade laser , analytical chemistry (journal) , spectroscopy , laser , absorption (acoustics) , cascade , infrared spectroscopy , fragmentation (computing) , molecule , infrared , optoelectronics , chemistry , optics , physics , composite material , operating system , organic chemistry , chromatography , quantum mechanics , terahertz radiation , computer science
In Ar and Ar/N2 RF plasmas with admixtures of aluminum tri‐isopropoxide (ATI) the fragmentation of this metal‐organic precursor has been studied by means of infrared absorption spectroscopy (IR‐AS) using an external‐cavity quantum cascade laser (EC‐QCL) arrangement. The experiments were performed in an asymmetric capacitively coupled reactor at a frequency of f = 13.56 MHz and a pressure of up to p = 10 Pa. The discharge power was in the range of P = 40 – 100 W. Using EC‐QCLAS the evolution of the concentrations of six stable molecules, CH4, C2H2, C2H4, H2O, HCN and HNO3, has been monitored in the plasma. The concentrations of these plasma chemical products were found to be in the range of about 7 × 10 12 – 2 × 10 14 molecules cm –3 (© 2012 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)