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Discharge Operation Mode Manipulation of Radio Frequency Atmospheric Pressure Glow Discharges in Argon
Author(s) -
Qian Y. J.,
Ding K.,
Song S. T.,
Guo Y.,
Zhang J.,
Shi J. J.
Publication year - 2012
Publication title -
contributions to plasma physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.531
H-Index - 47
eISSN - 1521-3986
pISSN - 0863-1042
DOI - 10.1002/ctpp.201100109
Subject(s) - glow discharge , argon , atmospheric pressure , helium , materials science , radio frequency , voltage , atomic physics , dielectric barrier discharge , mode (computer interface) , excitation , plasma , plasma cleaning , current (fluid) , mechanics , dielectric , optoelectronics , physics , telecommunications , computer science , meteorology , thermodynamics , quantum mechanics , operating system
Stable operation of radio frequency atmospheric glow discharges is widely desired by most processing applications for their conveniency and feasibility, many of which have been addressed with the noble gas of helium and low discharge current density in stable operation regime of α mode. Here, the operation mode manipulation of rf atmospheric pressure glow discharge in argon is investigated using a one‐dimensional self‐consistent modeling approach. Stable operation regime of α mode is found to expand with rinsing excitation frequency and reducing discharge gap distance. The sheath characteristics in terms of sheath voltage and sheath thickness are given to explain the of α ‐ γ mode transition. Furthermore, stable operation of discharge in γ mode is proposed tobe achieved by introducing dielectric barriers, which is indicated by monotonously growing of applied voltage with discharge current density (© 2012 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)