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Microstructured Plasma Sources
Author(s) -
Büttgenbach S.,
Lucas N.,
Sichler P.
Publication year - 2009
Publication title -
contributions to plasma physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.531
H-Index - 47
eISSN - 1521-3986
pISSN - 0863-1042
DOI - 10.1002/ctpp.200910066
Subject(s) - microplasma , plasma , atmospheric pressure , materials science , dielectric barrier discharge , nanotechnology , fabrication , atmospheric pressure plasma , dielectric , optoelectronics , physics , medicine , alternative medicine , pathology , quantum mechanics , meteorology
Dielectric barrier discharges generated in microcavities or by the use of microstructures have gained increasing interest in research and industry in recent years. This is due to the advantages of small dimensions of microstructured plasma sources and particularly their ability to generate plasmas at atmospheric pressure. In the scope of this work the design and fabrication of two different microplasma sources is presented. First, microplasma reactors based on microstructured electrode arrays which have detailed dimensions in the range of some tens of micrometers and have been successfully applied for the decomposition of waste gases are presented. Subsequently microplasma stamps, which allow the generation of microplasmas in closed cavities and which are powerful process tools for area‐selective modification of various surfaces at atmospheric pressure, are presented. (© 2009 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)