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Some Aspects of Reactive Complex Plasmas
Author(s) -
Berndt J.,
Kovačević E.,
Stefanović I.,
Stepanović O.,
Hong S. H.,
Boufendi L.,
Winter J.
Publication year - 2009
Publication title -
contributions to plasma physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.531
H-Index - 47
eISSN - 1521-3986
pISSN - 0863-1042
DOI - 10.1002/ctpp.200910016
Subject(s) - plasma , dusty plasma , chemical physics , materials science , physics , nanotechnology , nuclear physics
Abstract Reactive plasmas are nowadays widely used for technological applications. The spontaneous formation and growth of dust is a phenomenon frequently observed in such plasmas. The formation of dust particles has been observed in a great variety of different discharge types and in different kind of gases or gas mixtures. Due to the large variety of different phenomena that can be observed in reactive complex plasmas this article will address some selected (general) problems and examples that are specific for the physics and chemistry of such systems. These examples concern the formation and growth of dust particles in reactive plasmas, the mechanisms responsible for that growth processes, the spatial distribution of the dust particles within the discharge, the response of the plasma to the formation and growth of dust particles and some technological aspects (© 2009 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)