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Characteristics of VHF H 2 Plasma Produced at High Pressure
Author(s) -
Yamauchi Y.,
Takeuchi Y.,
Takatsuka H.,
Yamashita H.,
Muta H.,
Kawai Y.
Publication year - 2008
Publication title -
contributions to plasma physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.531
H-Index - 47
eISSN - 1521-3986
pISSN - 0863-1042
DOI - 10.1002/ctpp.200810056
Subject(s) - plasma , saturation current , materials science , saturation (graph theory) , ion , atomic physics , electron temperature , electron , plasma parameters , electrode , physics , voltage , nuclear physics , mathematics , quantum mechanics , combinatorics
A VHF H 2 plasma was produced with the multi rod electrode at high pressure and the plasma parameters were measured as a function of pressure for different VHF powers at 60 MHz. It was found that when the pressure is increased, the ion saturation current peaks at certain pressure and finally decreases at high pressures, while the electron temperature is around 10 eV. The wall potential at high pressure was lower than the values estimated from the electron temperature using the probe theory. Furthermore, the anomalous reduction of the electron saturation current was observed. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)