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Determination of Plasma Parameters from Thermal Probe Data
Author(s) -
Matsuura H.,
Jida T.
Publication year - 2006
Publication title -
contributions to plasma physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.531
H-Index - 47
eISSN - 1521-3986
pISSN - 0863-1042
DOI - 10.1002/ctpp.200610022
Subject(s) - plasma , heat flux , ion , electron temperature , thermal , materials science , flux (metallurgy) , plasma diagnostics , biasing , electron , atomic physics , voltage , plasma parameters , computational physics , physics , thermodynamics , heat transfer , nuclear physics , quantum mechanics , metallurgy
Thermal probe method uses heat flux data as the function of probe bias voltage. These data contain not only electron information but also ion one. In this paper, we applied a thermal probe to DC‐glow discharge plasma and test it to deduce electron and ion temperature. Obtained temperatures are in qualitative agreement with theoretical prediction, but the accuracy of heat flux measurement must be largely improved. (© 2006 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)