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Experiments on the Angular Dependence of the Ion Energy Reflection Coefficient at Low Energies
Author(s) -
Koch B.,
Bohmeyer W.,
Fussmann G.,
Matyash K.,
Schneider R.
Publication year - 2006
Publication title -
contributions to plasma physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.531
H-Index - 47
eISSN - 1521-3986
pISSN - 0863-1042
DOI - 10.1002/ctpp.200610018
Subject(s) - ion , atomic physics , range (aeronautics) , physics , reflection coefficient , reflection (computer programming) , trim , flux (metallurgy) , plasma , energy (signal processing) , computational physics , optics , materials science , nuclear physics , quantum mechanics , computer science , metallurgy , composite material , programming language , operating system
In this paper we present a method of deriving the ion energy reflection coefficient R E from simultaneous measurements of the current‐ and energy flux density as functions of the bias voltage applied. R E is measured as a function of the angle in a low temperature magnetized plasma. The measurements were performed for different ion gyro radii covering the whole angular range between normal and grazing incidence. The values thus obtained for R E are in the range 0.2 to 0.4. They are below theoretical values calculated using the TRIM code. In case of small ion gyro radii r i , a strong angular dependence of R E is observed which does not occur for large r i . (© 2006 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)