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PIC‐MCC Modeling of a Capacitive RF discharge
Author(s) -
Matyash K.,
Schneider R.
Publication year - 2004
Publication title -
contributions to plasma physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.531
H-Index - 47
eISSN - 1521-3986
pISSN - 0863-1042
DOI - 10.1002/ctpp.200410086
Subject(s) - physics , citation , computer science , library science