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Numerical Models of the Planar Magnetron Glow Discharges
Author(s) -
Kolev I.,
Bogaerts A.
Publication year - 2004
Publication title -
contributions to plasma physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.531
H-Index - 47
eISSN - 1521-3986
pISSN - 0863-1042
DOI - 10.1002/ctpp.200410085
Subject(s) - planar , range (aeronautics) , computer science , computational physics , numerical models , physics , statistical physics , computer simulation , algorithm , materials science , mechanics , composite material , computer graphics (images)
The outlines of two methods for numerical simulation ‐ hybrid and PIC/MCC of DC magnetrons are presented. Typical results from both of them are shown and compared. The hybrid model is faster, but has limited validity range. The PIC/MCC model, on the other hand, is stable for all operational conditions and does not require any assumptions, but is computationally expensive. (© 2004 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)