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Prospects of Phase Resolved Optical Emission Spectroscopy as a Powerful Diagnostic Tool for RF‐Discharges
Author(s) -
Gans T.,
Schulzvon der Gathen V.,
Döbele H. F.
Publication year - 2004
Publication title -
contributions to plasma physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.531
H-Index - 47
eISSN - 1521-3986
pISSN - 0863-1042
DOI - 10.1002/ctpp.200410074
Subject(s) - excited state , atomic physics , excitation , spectroscopy , materials science , population , dissociation (chemistry) , electron , hydrogen , emission spectrum , physics , spectral line , chemistry , demography , quantum mechanics , astronomy , sociology
Phase resolved optical emission spectroscopy (PROES) bears considerable potential for diagnostics of RF discharges that give detailed insight of spatial and temporal variations of excitation processes. Based on phase and space resolved measurements of the population dynamics of excited states several diagnostic techniques have been developed. Results for a hydrogen capacitively coupled RF (CCRF) discharge are discussed as an example. The gas temperature, the degree of dissociation and the temporally and spatially resolved electron energy distribution function (EEDF) of energetic electrons (>12eV) are measured. Furthermore, the pulsed electron impact excitation during the field reversal phase, typical for hydrogen CCRF discharges, is exploited for measurements of atomic and molecular data like lifetimes of excited states, coefficients for radiationless collisional de‐excitation (quenching coefficients), and cascading processes from higher electronic states. (© 2004 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)