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Hydrodynamic and Kinetic Modelling of Dust Free and Dusty Radio‐Frequency Discharges
Author(s) -
Goedheer W. J.,
Akdim M. R.,
Chutov Yu. I.
Publication year - 2004
Publication title -
contributions to plasma physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.531
H-Index - 47
eISSN - 1521-3986
pISSN - 0863-1042
DOI - 10.1002/ctpp.200410058
Subject(s) - kinetic energy , silane , radio frequency , mechanics , materials science , computational physics , physics , environmental science , atomic physics , telecommunications , classical mechanics , computer science , composite material
In this paper hydrodynamic and kinetic approaches to model low pressure capacitively coupled radio‐frequency discharges are discussed. In particular approaches and results for power modulated discharges in a mixture of silane and hydrogen and for discharges containing a considerable amount of dust particles will be presented. (© 2004 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)