Hydrodynamic and Kinetic Modelling of Dust Free and Dusty Radio‐Frequency Discharges | Zendy

Goedheer W. J. | Zendy; Akdim M. R. | Zendy; Chutov Yu. I. | Zendy

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Hydrodynamic and Kinetic Modelling of Dust Free and Dusty Radio‐Frequency Discharges

Author(s) -

Goedheer W. J.,

Akdim M. R.,

Chutov Yu. I.

Publication year - 2004

Publication title -

contributions to plasma physics

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.531

H-Index - 47

eISSN - 1521-3986

pISSN - 0863-1042

DOI - 10.1002/ctpp.200410058

Subject(s) - kinetic energy , silane , radio frequency , mechanics , materials science , computational physics , physics , environmental science , atomic physics , telecommunications , classical mechanics , computer science , composite material

In this paper hydrodynamic and kinetic approaches to model low pressure capacitively coupled radio‐frequency discharges are discussed. In particular approaches and results for power modulated discharges in a mixture of silane and hydrogen and for discharges containing a considerable amount of dust particles will be presented. (© 2004 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

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