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Boltzmann Equation Analysis of the Electron Gas in CF 4 Discharge Plasma
Author(s) -
Mašek K.,
Láska L.,
D'Agostino R.,
Cramarossa F.
Publication year - 1987
Publication title -
beiträge aus der plasmaphysik
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.531
H-Index - 47
eISSN - 1521-3986
pISSN - 0005-8025
DOI - 10.1002/ctpp.19870270103
Subject(s) - boltzmann equation , atomic physics , distribution function , plasma , electron , physics , plasma modeling , electric discharge in gases , kinetic energy , boltzmann constant , electron density , chemistry , classical mechanics , thermodynamics , quantum mechanics
The electron energy distribution function in CF 4 gas discharge was numerically calculated for density reduced electric field E/N = 15 ‐ 300 × 10 −17 Vcm 2 using the Boltzmann kinetic equation. The momentum transfer and vibrational cross‐sections were derived from available experimental swarm parameters while the cross‐sections for inelastic electron‐molecule collisional processes included were taken from the literature. The two‐term spherical harmonic expansion of the distribution function was used in the calculations.