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Electron Energy Distribution Functions in RF Molecular Plasmas: The Role of Second Kind Collisions
Author(s) -
Capitelli M.,
Dilonardo M.,
Winkler R.,
Wilhelm J.
Publication year - 1986
Publication title -
beiträge aus der plasmaphysik
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.531
H-Index - 47
eISSN - 1521-3986
pISSN - 0005-8025
DOI - 10.1002/ctpp.19860260608
Subject(s) - excited state , plasma , atomic physics , distribution function , electron , ground state , boltzmann equation , physics , energy (signal processing) , distribution (mathematics) , quantum mechanics , mathematical analysis , mathematics
Electron energy distribution functions in rf molecular plasmas have been calculated by solving the time dependent Boltzmann equation in the presence as well as the absence of vibrationally and electronically excited molecules and thus of first kind and second kind (superelastic) collisions with them. The results, which refer to a model plasma composed by three components (the ground state, a lumped vibrational state and a lumped electronic state), show that these collisions with vibrationally and electronically excited molecules strongly affect the modulation of the electron energy distribution function and related quantities.