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Abscheidung von Glimmpolymerschichten in einem weiten Metallrezipienten und Untersuchungen zur Struktur
Author(s) -
Möller W.,
Schmidt M.,
Seefeldt R.,
Wilberg R.
Publication year - 1984
Publication title -
beiträge aus der plasmaphysik
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.531
H-Index - 47
eISSN - 1521-3986
pISSN - 0005-8025
DOI - 10.1002/ctpp.19840240610
Subject(s) - analytical chemistry (journal) , scanning electron microscope , hexamethyldisiloxane , materials science , thermal stability , argon , volumetric flow rate , cathode , chemistry , chromatography , composite material , plasma , organic chemistry , physics , quantum mechanics
Investigations are reported of growth rate, chemical structure (IR‐spectroscopy, mass‐spectrometry), thermal stability, surface structure (scanning electron microscopy) of thin polymeric films grown in a gas (Ar‐hexamethyldisiloxane‐mixture) discharge with a heated cathode, which is situated in the centre of a cylindrical metallic vessel ( l = 50 cm, 2 r = 30 cm). The discharge conditions are the following: I = 0,25 – 4 A, U = 30 – 100 V, p = 6 – 40 Pa, argon flow rate = 3,8 · 10 −5 mol/min, Ar/HMDS = 1 : 0,7 – 1 : 2,4. The growth rate changes from 2 to 18 nm/min, depending on the discharge conditions. The reproducibility of the growth rate shows deviations smaller than 10%. The films consist of a highly cross linked polymeric material and are stable up to 260°C, the solubility in n‐hexane being smaller than 2%. The surface of the thin film ( d ∼ 10 2 nm) is smooth. Corrosion resistance to soda lye (0,2% NaOH) has been proved.