Abscheidung von Glimmpolymerschichten in einem weiten Metallrezipienten und Untersuchungen zur Struktur

Investigations are reported of growth rate, chemical structure (IR‐spectroscopy, mass‐spectrometry), thermal stability, surface structure (scanning electron microscopy) of thin polymeric films grown in a gas (Ar‐hexamethyldisiloxane‐mixture) discharge with a heated cathode, which is situated in the centre of a cylindrical metallic vessel ( l = 50 cm, 2 r = 30 cm). The discharge conditions are the following: I = 0,25 – 4 A, U = 30 – 100 V, p = 6 – 40 Pa, argon flow rate = 3,8 · 10 −5 mol/min, Ar/HMDS = 1 : 0,7 – 1 : 2,4. The growth rate changes from 2 to 18 nm/min, depending on the discharge conditions. The reproducibility of the growth rate shows deviations smaller than 10%. The films consist of a highly cross linked polymeric material and are stable up to 260°C, the solubility in n‐hexane being smaller than 2%. The surface of the thin film ( d ∼ 10 2 nm) is smooth. Corrosion resistance to soda lye (0,2% NaOH) has been proved.