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Ion Extraction of Cl Containing Plasmas — Problems and Possibilities of the Investigations of Plasma Processes
Author(s) -
Tiller H.J.,
Göbel R.,
Führ U.
Publication year - 1984
Publication title -
beiträge aus der plasmaphysik
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.531
H-Index - 47
eISSN - 1521-3986
pISSN - 0005-8025
DOI - 10.1002/ctpp.19840240505
Subject(s) - ion , plasma , mass spectrometry , decomposition , chemistry , extraction (chemistry) , body orifice , electron ionization , mass spectrum , atomic physics , spectrometer , analytical chemistry (journal) , ionization , physics , chromatography , nuclear physics , optics , ecology , organic chemistry , biology
The ion extraction is investigated from Cl 2 ‐, SiCl 4 ‐ and CCl 4 ‐plasmas within a planer‐reactor in dependence on pressure and power density. Furthermore the relative ion formation cross sections of the ions fragments of these gases are measured versus the electron energy within a mass spectrometer tube. It will be concluded the decomposition of these gases from the measured ratios of the extracted currents of single ions in dependence on the plasma parameters. The extracted ion spectra extrapolated to a low degree of decomposition are compared with the ion fragments formed by electron impact within the mass spectrometer tube and thereby the effective electron energy in the plasma sheath nearby the orifice estimated.