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Kinetics of Oxygen Atom Production in R.F. Discharges of Moderate Pressures
Author(s) -
Cramarossa F.,
D'Agostino R.,
Molinari E.
Publication year - 1978
Publication title -
beiträge aus der plasmaphysik
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.531
H-Index - 47
eISSN - 1521-3986
pISSN - 0005-8025
DOI - 10.1002/ctpp.19780180503
Subject(s) - dissociation (chemistry) , metastability , torr , recombination , oxygen , atomic physics , chemistry , kinetics , plasma , oxygen atom , atom (system on chip) , kinetic energy , excitation , physics , thermodynamics , molecule , biochemistry , organic chemistry , gene , quantum mechanics , computer science , embedded system
The dissociation of molecular oxygen has been studied in a radiofrequency plasma at a pressure of 20 torr in a flow system. The results show that the main channel for dissociation is via electron excitation to the Herzberg and Schumann systems with negligible contribution of the channel involving the O 2 (a 1 Δ g ) metastable. While oxygen atom recombination can be followed outside the discharge region, kinetic data show that recombination within the discharge is effectively suppressed, probably as a consequence of a recombination assisted dissociation mechanism. This leads to high concentrations of O ‐atoms at the discharge exit.