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Untersuchungen zur chemischen Struktur von Glimmpolymerschichten aus Hexamethyldisiloxan (HMDS)
Author(s) -
Möller W.,
Schmidt M.
Publication year - 1977
Publication title -
beiträge aus der plasmaphysik
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.531
H-Index - 47
eISSN - 1521-3986
pISSN - 0005-8025
DOI - 10.1002/ctpp.19770170206
Subject(s) - dissociation (chemistry) , chemistry , polymer , glow discharge , torr , analytical chemistry (journal) , mass spectrometry , thin film , infrared spectroscopy , molecule , mass spectrum , plasma , materials science , organic chemistry , chromatography , nanotechnology , physics , quantum mechanics , thermodynamics
The structure of thin polymer films formed on the wall of the discharge tube ( r = 2 cm) in the region of the positive column of a low pressure glow discharge ( i = 40 mA, p = 0,5 Torr) with flowing gas (mixture of Ar and HMDS, p Ar / p HMDS = 10/1, v = 10 cm/s) is investigated with IR spectroscopy, elementary analysis and mass spectrometry. The IR‐spectrum of the thin film is similar to the spectrum of HMDS. The increase of the ratio of the concentration of CH 2 ‐ to CH 3 ‐groups with growing distance from the HMDS input indicates an increasing cross linking of the polymer film. The dissociation of the HMDS molecule in the plasma is proposed as the first step of film building reactions.