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Application of X‐rays to the Study of the Surface Roughness
Author(s) -
Żymierska D.,
Auleytner J.
Publication year - 1997
Publication title -
crystal research and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.377
H-Index - 64
eISSN - 1521-4079
pISSN - 0232-1300
DOI - 10.1002/crat.2170320113
Subject(s) - surface roughness , surface finish , optics , surface (topology) , materials science , amplitude , reflectivity , fresnel equations , crystal (programming language) , thin film , epitaxy , physics , geometry , computer science , composite material , mathematics , nanotechnology , layer (electronics) , refractive index , programming language
Abstract The paper presents problems of an application of grazing incidence X‐ray reflectivity as a tool for investigations of the surface roughness. The theoretical calculations are based on Fresnel theory. The surface roughness reduces the reflected amplitude therefore a damping factor describing an influence of that is introduced into equations. The results of computer simulations have been used for estimation of the measured surface roughness of thin epitaxial Si film and GaAs single crystal.