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VLS Growth of ITO Whiskers Prepared by the Electron Shower Method
Author(s) -
Yumoto Hisami,
Onozumi Shigekazu,
Kato Yoshinori,
Ishihara Masatou,
Kishi Kiyoshi
Publication year - 1996
Publication title -
crystal research and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.377
H-Index - 64
eISSN - 1521-4079
pISSN - 0232-1300
DOI - 10.1002/crat.2170310205
Subject(s) - whiskers , substrate (aquarium) , whisker , crystallite , materials science , scanning electron microscope , indium tin oxide , perpendicular , indium , nanotechnology , composite material , optoelectronics , thin film , metallurgy , oceanography , geometry , mathematics , geology
Indium tin oxide (ITO) whiskers were grown by VLS (vapour‐liquid‐solid) mechanism, using the electron shower method. The whiskers were grown above 200 °C, and the deposition rate was above 0.6 nm/s. The electron shower controlled the size of the whiskers, and the size was 30 nm in diameter and 600 nm in length. The whiskers grew along the substrate at t < 300 s, but grew in a direction perpendicular to the substrate at t > 300 s. When the ITO whiskers grown along the substrate were used as NO 2 gas sensor, the sensitivity was 340, and about 300 times higher than those of the whiskers grown in a direction perpendicular to the substrate and plate‐like ITO crystallites.