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M. Gentili, C. Giovannella and S. Selci (eds). Nanolithography: A Borderland between STM, EB, IB and X‐ray Lithographies. NATO ASI Series; Series E: Applied Sciences – Vol. 264. Kluwer Academic Publishers, Dordrecht/Boston/London 1994 ISBN 0–7923–2794‐2 215 Seiten, 149 Abbildungen. Preis: Dfl 185.00/US $ 106.00
Author(s) -
Süptitz P.
Publication year - 1995
Publication title -
crystal research and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.377
H-Index - 64
eISSN - 1521-4079
pISSN - 0232-1300
DOI - 10.1002/crat.2170300611
Subject(s) - citation , library science , series (stratigraphy) , physics , nanotechnology , computer science , materials science , geology , paleontology