Premium
L. F. Thompson, C. G. Willson, M. J. Bowden (ed.). Introduction to Microlithography Second Edition. American Chemical Society, Washington, DC 1994, 527 Seiten, US $ 59,95 IBBN 8–8412–2848–5
Author(s) -
Süptitz P.
Publication year - 1995
Publication title -
crystal research and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.377
H-Index - 64
eISSN - 1521-4079
pISSN - 0232-1300
DOI - 10.1002/crat.2170300415
Subject(s) - citation , library science , history , computer science