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On the Inhomogeneity of Refractive Index of CaF 2 Crystals for High Performance Optics
Author(s) -
Dressler L.,
Rauch R.,
Reimann R.
Publication year - 1992
Publication title -
crystal research and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.377
H-Index - 64
eISSN - 1521-4079
pISSN - 0232-1300
DOI - 10.1002/crat.2170270320
Subject(s) - refractive index , homogeneity (statistics) , optics , lithography , materials science , x ray optics , immersion lithography , crystal optics , quartz , high refractive index polymer , optoelectronics , resist , nanotechnology , physics , laser , composite material , x ray , statistics , mathematics , layer (electronics)
CaF 2 ‐crystals belong to the standard materials, used in optical precision instruments. As well as the traditional optics for microscopy new developments in the field of DUV‐lithography (projecting lenses made out of CaF 2 and quartz) need a homogeneity of the refractive index in the order of 10 −6 , but over much larger volumes (diameter of the projecting lenses for lithography >100mm). Some interesting physical connections between the real structure of the crystals and the homogeneity of refractive index are discussed.