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On Chemical Kinetics of Silicon Deposition from Silane (V) The Effect of Hydrogen Formation
Author(s) -
Kühne H.
Publication year - 1991
Publication title -
crystal research and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.377
H-Index - 64
eISSN - 1521-4079
pISSN - 0232-1300
DOI - 10.1002/crat.2170260606
Subject(s) - silane , chemistry , hydrogen , isothermal process , volume (thermodynamics) , reaction rate constant , thermodynamics , total pressure , constant (computer programming) , silicon , pyrolysis , kinetics , organic chemistry , physics , computer science , programming language , quantum mechanics
In consequence of hydrogen formation during silane pyrolysis total gas volume increases, when the reaction proceeds at constant total pressure. Any mole of silane decomposed produces two moles of hydrogen. In the present paper expressions are derived for 1 st and 0.5 th reaction order describing axial growth rate distribution of the isothermally proceeding reaction for the condition of constant total pressure. Those theoretically expected distributions are compared with results obtained by way of experiment on the one hand and those theoretically expected for the condition of constant gas volume on the other. It is concluded that the experimental results discussed rather agree with constant gas volume than with constant total pressure conditions. So, a compensating increase of total pressure along the tube axis might be supposed.