Premium
Three X‐ray diffraction methods for testing of large disk‐shaped or lentiform CaF 2 ‐crystals for high‐performance optics
Author(s) -
Dressler L.,
Kafka F.,
Krässlich J.,
Wehrhan O.
Publication year - 1990
Publication title -
crystal research and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.377
H-Index - 64
eISSN - 1521-4079
pISSN - 0232-1300
DOI - 10.1002/crat.2170250920
Subject(s) - optics , crystal (programming language) , context (archaeology) , refractive index , materials science , diffraction , lithography , crystal optics , refraction , x ray optics , x ray , optoelectronics , physics , geology , computer science , laser , programming language , paleontology
Three methods (Lang‐topgraphy, one‐crystal‐rocking curves with scan‐step‐registration, two‐crystal‐diffractometry (TCD) with a large registered area) were tested. The reached parameters as well as advantages and disadvantages are discussed. The purpose of the examination is the application of CaF 2 ‐crystals with high diameters (⪆ 100 mm) in high‐performance optics for the UV‐lithography. Especially in this context the influence of defects of the crystal structure on the index of refraction has been examined.