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Dennis W. Hess, Klavs F. Jensen (eds). Microelectronics processing — chemical engineering aspects. Advances in chemistry series 221. American Chemical Society, Washington, DC 1989, 548 Seiten, 173 Abbildungen, 28 Tabellen, Register, ISBN 0‐8412‐1475‐1
Author(s) -
Gottschalch V.
Publication year - 1990
Publication title -
crystal research and technology
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.377
H-Index - 64
eISSN - 1521-4079
pISSN - 0232-1300
DOI - 10.1002/crat.2170250526
Subject(s) - microelectronics , engineering physics , library science , citation , chemical laboratory , computer science , chemistry , polymer science , nanotechnology , engineering , materials science , chemical safety , biochemical engineering