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Numerical simulation of MOVPE Al x Ga 1− x As: Control of composition variation
Author(s) -
Makarov Yu. N.,
Zhmakin A. I.
Publication year - 1990
Publication title -
crystal research and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.377
H-Index - 64
eISSN - 1521-4079
pISSN - 0232-1300
DOI - 10.1002/crat.2170250108
Subject(s) - metalorganic vapour phase epitaxy , composition (language) , solid solution , variation (astronomy) , inverse , mass transfer , materials science , analytical chemistry (journal) , chemistry , mathematics , thermodynamics , physics , epitaxy , nanotechnology , geometry , chromatography , metallurgy , linguistics , philosophy , layer (electronics) , astrophysics
Step response functions are introduced to describe the nonstationary mass transfer in MOVPE AlGaAs growth. The solutions of direct problem and inverse one of the control of solid solution composition are presented.