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The cross contamination problem in AlGaAs/InGaP/AlGaAs liquid phase epitaxy
Author(s) -
Chang L. B.,
Cheng K. Y.,
Liu C. C.
Publication year - 1989
Publication title -
crystal research and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.377
H-Index - 64
eISSN - 1521-4079
pISSN - 0232-1300
DOI - 10.1002/crat.2170241224
Subject(s) - library science , citation , liquid phase , engineering physics , computer science , physics , thermodynamics
[[fileno]]2030161010152[[department]]電機工程學