Premium
Infrared optical characterization of epitaxial layer — substrate systems (I) theoretical relations
Author(s) -
Riede V.,
Neumann H.,
Sobotta H.
Publication year - 1988
Publication title -
crystal research and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.377
H-Index - 64
eISSN - 1521-4079
pISSN - 0232-1300
DOI - 10.1002/crat.2170230909
Subject(s) - epitaxy , substrate (aquarium) , layer (electronics) , materials science , infrared , optoelectronics , optics , absorption (acoustics) , transmittance , characterization (materials science) , composite material , nanotechnology , physics , geology , oceanography
Theoretical relations are given for the transmittance and reflectance of an epitaxial layer substrate system with arbitrary absorption in both the layer and the substrate. Some peculiarities of the optical spectra of epitaxial layer‐substrate systems in the infrared spectral range are discussed. Methods are described for determining the thickness and the material parameters of both the epitaxial layer and the substrate.