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L. A. Casper (ed.). Microelectronics Processing: Inorganic Materials Characterization. ACS Symposium Series 295. American Chemical Society, Washington, D.C. 1986, 443 pp., 223 Figs., $ 95.95, ISBN 0‐8412‐0934‐0
Author(s) -
Heydenreich J.
Publication year - 1986
Publication title -
crystal research and technology
Language(s) - Italian
Resource type - Journals
SCImago Journal Rank - 0.377
H-Index - 64
eISSN - 1521-4079
pISSN - 0232-1300
DOI - 10.1002/crat.2170211010
Subject(s) - library science , citation , microelectronics , characterization (materials science) , engineering physics , computer science , nanotechnology , materials science , engineering
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