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Thermodynamic Calculation of the Alloy Composition of Ga x In 1− x As Grown in the Trichloride System Using Solid Sources
Author(s) -
Simon I.,
Jacobs K.,
Butter E.
Publication year - 1986
Publication title -
crystal research and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.377
H-Index - 64
eISSN - 1521-4079
pISSN - 0232-1300
DOI - 10.1002/crat.2170210209
Subject(s) - alloy , solid solution , hydride , composition (language) , materials science , chemical composition , analytical chemistry (journal) , thermodynamics , chemistry , metallurgy , physics , metal , linguistics , philosophy , chromatography
The dependence of the Ga x In 1− x As alloy composition as a function of the experimental input variables is calculated for a growth system using AsCl 3 and solid GaAs and InAs sources. The results are similar to those earlier obtained for growth in the hydride system. Additional AsCl 3 introduced downstream the source regions shifts the alloy composition towards higher GaAs content.