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A modified heater system for RF‐Czochralski equipments
Author(s) -
Reiche P.,
Hermoneit B.,
Schultze D.
Publication year - 1985
Publication title -
crystal research and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.377
H-Index - 64
eISSN - 1521-4079
pISSN - 0232-1300
DOI - 10.1002/crat.2170200626
Subject(s) - crucible (geodemography) , induction heating , czochralski method , induction coil , micro pulling down , materials science , crystal (programming language) , electromagnetic coil , crystal growth , mechanical engineering , electrical engineering , optoelectronics , crystallography , chemistry , engineering , computer science , silicon , computational chemistry , programming language
The temperature gradients in a Czochralski‐type crystal growth equipment with induction heating can be advantageously influenced by additionally heating the growing crystal and the crucible bottom during the pulling procedure. An experimental solution is presented for both afterheater and bottom heater coupled to the same induction coil as the crucible.