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Introduction to microlithography — theory, materials, and processing 363 p., price: U. S. & Canada $ 49.95, export $ 59.95
Author(s) -
Thompson L. F.,
Wilson O. G.,
Bowden M. J.,
Hennig H.
Publication year - 1984
Publication title -
crystal research and technology
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.377
H-Index - 64
eISSN - 1521-4079
pISSN - 0232-1300
DOI - 10.1002/crat.2170191019
Subject(s) - library science , classics , history , computer science
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