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Semiconductor etching in a gas‐discharge
Author(s) -
Halser K.,
Heymann G.
Publication year - 1984
Publication title -
crystal research and technology
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.377
H-Index - 64
eISSN - 1521-4079
pISSN - 0232-1300
DOI - 10.1002/crat.2170190527
Subject(s) - humanities , library science , art , computer science