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Investigations of flash evaporated cub III C 2 VI semiconductor thin films by Rutherford backscattering spectroscopy
Author(s) -
Höbler H.J.,
Flagmeyer R.,
Schumann B.
Publication year - 1983
Publication title -
crystal research and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.377
H-Index - 64
eISSN - 1521-4079
pISSN - 0232-1300
DOI - 10.1002/crat.2170180111
Subject(s) - analytical chemistry (journal) , thin film , stoichiometry , rutherford backscattering spectrometry , spectroscopy , evaporation , substrate (aquarium) , rutherford scattering , chemical composition , x ray spectroscopy , chemistry , materials science , flash evaporation , scattering , optics , physics , nanotechnology , oceanography , neutron scattering , organic chemistry , chromatography , quantum mechanics , small angle neutron scattering , geology , thermodynamics
The chemical composition of CuB III C 2 VI thin films grown by flash evaporation technique was analysed using Rutherford backscattering spectroscopy. The composition of the samples changes with variation of the substrate temperature. In certain temperature ranges nearly stoichiometric layers were obtained.