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Improved Spatial Resolution in Electron Probe Microanalysis of Multilayer Structures
Author(s) -
Sasama F.,
Geselle B.
Publication year - 1982
Publication title -
crystal research and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.377
H-Index - 64
eISSN - 1521-4079
pISSN - 0232-1300
DOI - 10.1002/crat.2170170820
Subject(s) - microanalysis , electron probe microanalysis , resolution (logic) , image resolution , heterojunction , electron , analytical chemistry (journal) , optics , materials science , chemistry , mineralogy , electron microprobe , optoelectronics , physics , computer science , nuclear physics , organic chemistry , chromatography , artificial intelligence
A method is described to measure composition profiles of layer systems on substrates by electron probe microanalysis with an improved effective spatial resolution down to 0.1 μm. The resolution problem in microanalysis of angle lapped layers and the related experimental problems are discussed and examples of composition profile measurements at GaAs‐Al x Ga 1– x As double‐heterostructures are presented.