Premium
Structural investigation and electronic band transitions of nanostructured TiO 2 thin films
Author(s) -
Sebnem Cetin S.,
Corekci S.,
Cakmak M.,
Ozcelik S.
Publication year - 2011
Publication title -
crystal research and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.377
H-Index - 64
eISSN - 1521-4079
pISSN - 0232-1300
DOI - 10.1002/crat.201100195
Subject(s) - materials science , annealing (glass) , anatase , thin film , photoluminescence , rutile , analytical chemistry (journal) , sputter deposition , grain size , titanium dioxide , atmospheric temperature range , sputtering , chemical engineering , nanotechnology , composite material , optoelectronics , chemistry , photocatalysis , biochemistry , chromatography , engineering , catalysis , physics , meteorology
Titanium dioxide (TiO 2 ) thin film was deposited on n‐Si (100) substrate by reactive DC magnetron sputtering system at 250 °C temperature. The deposited film was thermally treated for 3 h in the range of 400‐1000 °C by conventional thermal annealing (CTA) in air atmosphere. The effects of the annealing temperature on the structural and morphological properties of the films were investigated by X‐ray diffraction (XRD) and atomic force microscopy (AFM), respectively. XRD measurements show that the rutile phase is the dominant crystalline phase for the film annealed at 800 °C. According to AFM results, the increased grain sizes indicate that the annealing improves the crystalline quality of the TiO 2 film. In addition, the formation of the interfacial SiO 2 layer between TiO 2 film and Si substrate was evaluated by the transmittance spectra obtained with FTIR spectrometer. The electronic band transitions of as‐deposited and annealed films were also studied by using photoluminescence (PL) spectroscopy at room temperature. The results show that the dislocation density and microstrain in the film were decreased by increasing annealing temperature for both anatase and rutile phases. (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)