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Development of a hybrid sputtering/evaporation process for Cu(In,Ga)Se 2 thin film solar cells
Author(s) -
Acciarri M.,
Binetti S.,
Le Donne A.,
Lorenzi B.,
Caccamo L.,
Miglio L.,
Moneta R.,
Marchionna S.,
Meschia M.
Publication year - 2011
Publication title -
crystal research and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.377
H-Index - 64
eISSN - 1521-4079
pISSN - 0232-1300
DOI - 10.1002/crat.201000670
Subject(s) - sputtering , copper indium gallium selenide solar cells , evaporation , solar cell , deposition (geology) , substrate (aquarium) , materials science , layer (electronics) , thin film , selenium , sputter deposition , chemical engineering , metal , metallurgy , analytical chemistry (journal) , chemistry , optoelectronics , nanotechnology , environmental chemistry , paleontology , oceanography , physics , sediment , biology , geology , engineering , thermodynamics
In this paper we report a new method for Cu(In,Ga)Se 2 deposition for solar cell application. Differently from the common co‐evaporation process, an alterative approach for thin film Cu(In,Ga)Se 2 has been tested: the sputtering deposition of metal elements combined with the selenium evaporation. We have studied the relationships between the growth parameters of our hybrid sputtering/evaporation method and the chemical‐physical properties of the CIGS films. The cells are completed with a CdS buffer layer deposited by chemical bath deposition and ZnO + ITO deposited by RF sputtering. Test solar cells of 0.5 cm 2 have shown an efficiency of 10% and 2.5% on glass and stainless steel substrate respectively. (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)