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Effect of substrate temperature on structural and materials properties of zirconium nitride films on D9 steel substrates
Author(s) -
Ashok K.,
Subramanian B.,
Kuppusami P.,
Jayachandran M.
Publication year - 2009
Publication title -
crystal research and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.377
H-Index - 64
eISSN - 1521-4079
pISSN - 0232-1300
DOI - 10.1002/crat.200800630
Subject(s) - zirconium nitride , crystallite , x ray photoelectron spectroscopy , materials science , zirconium , lattice constant , thin film , nitride , substrate (aquarium) , sputter deposition , sputtering , texture (cosmology) , composite material , metallurgy , chemical engineering , analytical chemistry (journal) , nanotechnology , layer (electronics) , chemistry , titanium nitride , optics , diffraction , artificial intelligence , image (mathematics) , oceanography , computer science , engineering , physics , geology , chromatography
Thin zirconium nitride (ZrN) films were prepared by using reactive direct current (DC) magnetron sputtering onto D9 steel substrates. XRD technique was employed to study the coatings, observing variations of crystallite size, crystallite texture and lattice constant, as a function of substrate temperature. Chemical states of the ZrN thin films were determined by X‐ray photoelectron microscopy (XPS). AFM picture showed the presence of spherical shaped grains on the top of homogeneous granular surface. The hardness and elastic modulus values were measured by nanoindendation and their values are 18.5 and 343 GPa respectively. (© 2009 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)